Metal Impurities in Silicon-Device Fabrication (1995) (Springer Series in Materials Science #24)
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- Synopsis
- A discussion of the different mechanisms responsible for contamination together with a survey of their impact on device performance. The author examines the specific properties of main and rare impurities in silicon, as well as the detection methods and requirements in modern technology. Finally, impurity gettering is studied along with modern techniques to determine gettering efficiency. Throughout all of these subjects, the book presents only reliable and up-to-date data so as to provide a thorough review of recent scientific investigations.
- Copyright:
- 1995
Book Details
- Book Quality:
- Publisher Quality
- ISBN-13:
- 9783642975936
- Related ISBNs:
- 9783540583172
- Publisher:
- Springer Berlin Heidelberg
- Date of Addition:
- 07/12/22
- Copyrighted By:
- N/A
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Science, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.