Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices (1998) (NATO Science Partnership Subseries: 3 #47)
By: and and
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- Synopsis
- An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.
- Copyright:
- 1998
Book Details
- Book Quality:
- Publisher Quality
- ISBN-13:
- 9789401150088
- Related ISBNs:
- 9780792350071
- Publisher:
- Springer Netherlands
- Date of Addition:
- 08/03/22
- Copyrighted By:
- N/A
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.
- Edited by:
- Eric Garfunkel
- Edited by:
- Evgeni Gusev
- Edited by:
- Alexander Vul'
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- by Eric Garfunkel
- by Evgeni Gusev
- by Alexander Vul'
- in Nonfiction
- in Technology