Defect Recognition and Image Processing in Semiconductors 1997: Proceedings of the seventh conference on Defect Recognition and Image Processing, Berlin, September 1997
By:
Sign Up Now!
Already a Member? Log In
You must be logged into UK education collection to access this title.
Learn about membership options,
or view our freely available titles.
- Synopsis
- Defect Recognition and Image Processing in Semiconductors 1997 provides a valuable overview of current techniques used to assess, monitor, and characterize defects from the atomic scale to inhomogeneities in complete silicon wafers. This volume addresses advances in defect analyzing techniques and instrumentation and their application to substrates, epilayers, and devices. The book discusses the merits and limits of characterization techniques; standardization; correlations between defects and device performance, including degradation and failure analysis; and the adaptation and application of standard characterization techniques to new materials. It also examines the impressive advances made possible by the increase in the number of nanoscale scanning techniques now available. The book investigates defects in layers and devices, and examines the problems that have arisen in characterizing gallium nitride and silicon carbide.
- Copyright:
- 1998
Book Details
- Book Quality:
- Publisher Quality
- Book Size:
- 524 Pages
- ISBN-13:
- 9781351456463
- Related ISBNs:
- 9781315140810, 9780750305006
- Publisher:
- CRC Press
- Date of Addition:
- 09/04/23
- Copyrighted By:
- IOP Publishing Ltd and individual contributors.
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Science
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.