Micro and Nano Fabrication Tools and Processes

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Synopsis

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Book details

Edition:
2015
Author:
Hans H. Gatzen, Volker Saile, Jürg Leuthold
ISBN:
9783662443958
Related ISBNs:
9783662443941
Publisher:
Springer Berlin Heidelberg
Pages:
N/A
Reading age:
Not specified
Includes images:
Yes
Date of addition:
2019-10-08
Usage restrictions:
Copyright
Copyright date:
2015
Copyright by:
N/A 
Adult content:
No
Language:
English
Categories:
Nonfiction, Technology