CMOS - MEMS

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Synopsis

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.

Book details

Edition:
11
Series:
Advanced Micro and Nanosystems
Author:
Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
ISBN:
9783527675067
Related ISBNs:
9783527334995, 9783527334995
Publisher:
Wiley
Pages:
608
Reading age:
Not specified
Includes images:
No
Date of addition:
2019-11-06
Usage restrictions:
Copyright
Copyright date:
2013
Copyright by:
N/A 
Adult content:
No
Language:
English
Categories:
Nonfiction, Technology