Molecular Beam Epitaxy Fundamentals and Current Status

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Synopsis

Molecular Beam Epitaxy describes a technique in wide-spread use for the production of high-quality semiconductor devices. It discusses the most important aspects of the MBE apparatus, the physics and chemistry of the crystallization of various materials and device structures, and the characterization methods that relate the structural parameters of the grown (or growing) film or structure to the technologically relevant procedure. In this second edition two new fields have been added: crystallization of as-grown low-dimensional heterostructures, mainly quantum wires and quantum dots, and in-growth control of the MBE crystallization process of strained-layer structures. Out-of-date material has been removed.

Book details

Edition:
2nd ed. 1996
Series:
Springer Series in Materials Science (Book 7)
Author:
Marian A. Herman, Helmut Sitter
ISBN:
9783642800603
Related ISBNs:
9783540605942
Publisher:
Springer Berlin Heidelberg
Pages:
N/A
Reading age:
Not specified
Includes images:
No
Date of addition:
2022-08-29
Usage restrictions:
Copyright
Copyright date:
1996
Copyright by:
N/A 
Adult content:
No
Language:
English
Categories:
Nonfiction, Science, Technology